Device and method for liquid treating disc-like articles
US8147618B2 · kind B2 · utility
3Cited by
3References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 7, 2007 |
| Grant date | Apr 3, 2012 |
| Priority date | — |
| Expiry date | Feb 11, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67028
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Herein disclosed is a device and a method for liquid treatment of a disc-like article comprising rotating a disc-like article, dispensing liquid onto the disc-like article when rotated, collecting liquid, which is flung off the disc-like article when rotated, providing a plate arranged parallel to the disc-like article and facing the disc-like article when rotated, and directing gas parallel to the plate across the plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.