Methods and systems for providing illumination of a specimen for inspection
US8148900B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2007 |
| Grant date | Apr 3, 2012 |
| Priority date | — |
| Expiry date | Jan 30, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems for providing illumination of a specimen for inspection are provided. One embodiment relates to a system configured to provide illumination of a specimen for inspection. The system includes an electrodeless lamp configured to generate light. The system is further configured such that the light illuminates the specimen during the inspection. Another embodiment relates to a system configured to inspect a specimen. The system includes an electrodeless lamp configured to generate light and one or more optical elements configured to direct the light to the specimen. The system also includes a detection subsystem configured to generate output responsive to light from the specimen. The output can be used to detect defects on the specimen. An additional embodiment relates to a method for providing illumination of a specimen for inspection. The method includes illuminating the specimen during the inspection with light generated by an electrodeless lamp.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.