Thermal tuning of an optical device
US8150223B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2009 |
| Grant date | Apr 3, 2012 |
| Priority date | — |
| Expiry date | Apr 19, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2202/10
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Embodiments of an optical device, an array of optical devices, and a technique for fabricating the optical device or the array are described. This optical device is implemented on a substrate (such as silicon), and includes a thermally tunable optical waveguide with a high thermal resistance to the surrounding external environment and a low thermal resistance to a localized heater. In particular, the thermal resistances associated with thermal dissipation paths from a heater in the optical device to an external environment via electrodes and via the substrate are increased, while the thermal resistance between the optical waveguide and the heater is decreased.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.