Heating process apparatus
US8150243B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2009 |
| Grant date | Apr 3, 2012 |
| Priority date | — |
| Expiry date | Oct 1, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/0805
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A heating process apparatus includes a process chamber, a heat-processed object support member provided in the process chamber for heating a substrate disposed thereon, a cap for covering the substrate disposed on the heat-processed object support member, a heater for heating the heat-processed object support member, a temperature measuring unit for measuring the temperature of the heat-processed object support member, and a controller for controlling the heater. A first measuring unit measures a temperature of the cap, and the controller controls the heater so as to set the cap temperature to a predetermined temperature. A second measuring unit measures a temperature of the heat-processed object support member, and the controller turns off the heater when the temperature of the heat-processed object support member exceeds an over-heat critical temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.