Akihiro Egami
7Patents
2h-index
16Co-inventors
44Inventor score
Filing activity: Dec 6, 2007 → Jan 17, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7807553B2 | Substrate heating apparatus and semiconductor fabrication method | Electricity | 3 | Active |
| US8150243B2 | Heating process apparatus | Physics | 2 | Active |
| US7897523B2 | Substrate heating apparatus, heating method, and semiconductor device manufacturing method | Electricity | 2 | Active |
| US8198182B2 | Annealing method for semiconductor device with silicon carbide substrate and semiconductor device | Electricity | 1 | Active |
| US9194038B2 | Thin film forming apparatus, thin film forming method, and shield component | Electricity | 0 | Active |
| US8007633B2 | Surface processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US12148297B2 | In-vehicle apparatus, roadside apparatus, and communication method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.