Patent · US Active

Pentakis(dimethylamino) disilane precursor comprising compound and method for the preparation thereof

US8153832B2 · kind B2 · utility

6Cited by

0References

5Claims

0Family size

Assignee

L'Air Liquide, Societe Anonyme Pour l'Etude et l'Exploitation des Procedes Georges Claude · FR

Inventor

Christian Dussarrat · Tokyo, JP

Key dates

Filing date	Apr 3, 2006
Grant date	Apr 10, 2012
Priority date	—
Expiry date	Aug 22, 2027

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC07F7/12
WIPO fieldOrganic fine chemistry
WIPO sectorChemistry

Abstract

Pentakis(dimethylamino) disilane with general formula (1): Si2(NMe2)5Y, where Y is selected from the group comprising H, Cl or an amino group its preparation method and its use to manufacture gate dielectric films or etch-stop dielectric films of SiN or SiON.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.