Patent · US Active

Device and process for applying and/or detaching a wafer to/from a carrier

US8157615B2 · kind B2 · utility

7Cited by
15References
15Claims
0Family size

Inventor

Key dates

Filing dateMar 12, 2009
Grant dateApr 17, 2012
Priority date—
Expiry dateSep 30, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2221/68318
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

The invention relates to a device for applying and/or detaching a wafer to/from a carrier with

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.