Holding member for inspection, inspection device and inspecting method
US8159245B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2007 |
| Grant date | Apr 17, 2012 |
| Priority date | — |
| Expiry date | Aug 27, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/0408
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Installed in a probe device is a holding member for inspection which can be mounted on a chuck. The holding member for inspection includes a support plate capable of mounting thereon a chip in which the power device is formed; pins for positioning the chip mounted on the support plate; and a metal film formed on a surface of the support plate in a range from a mounting area on which the chip is mounted to an exposed area on which the chip is not mounted. When inspecting the power device, the chip is fixed onto the mounting area in the holding member for inspection, one probe pin is brought into contact with a terminal on a top surface of the chip; and another probe pin is brought into contact with the metal film in the exposed area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.