Self displacement sensing cantilever and scanning probe microscope
US8161568B2 · kind B2 · utility
1Cited by
20References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 24, 2009 |
| Grant date | Apr 17, 2012 |
| Priority date | — |
| Expiry date | Oct 5, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever has a probe portion and a cantilever portion having a free end portion from which the probe portion extends. A displacement detecting portion detects a displacement of the cantilever portion according to an interaction between a sample and the probe portion. An electrode portion is connected to the displacement detecting portion. An insulation film is formed over at least one of the electrode portion and the displacement detecting portion. A functional coating in the form one of a conductive film, a magnetic film, and a film having a light intensity amplifying effect is disposed on the insulation film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.