Method and apparatus for obtaining quantitative measurements using a probe based instrument
US8161805B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2009 |
| Grant date | Apr 24, 2012 |
| Priority date | — |
| Expiry date | Apr 18, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/366
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.