Patent · US Active

System for modifying small structures

US8163641B2 · kind B2 · utility

5Cited by

20References

18Claims

0Family size

Assignee

FEI Company · US

Inventors

George Y. Gu · Andover, US
Neil J. Bassom · Hamilton, US
Thomas J. Gannon · Ipswich, US
Kun Liu · Portland, US

Key dates

Filing date	Jan 28, 2010
Grant date	Apr 24, 2012
Priority date	—
Expiry date	Jan 28, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/76892
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A charge transfer mechanism is used to locally deposit or remove material for a small structure. A local electrochemical cell is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle beam or laser system to modify small structures, such as integrated circuits or micro-electromechanical system. The charge transfer process can be performed in air or, in some embodiments, in a vacuum chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.