Patent · US Active

Electron beam source and method of manufacturing the same

US8164071B2 · kind B2 · utility

1Cited by

5References

27Claims

0Family size

Assignees

Carl Zeiss NTS GmbH · US
Nanotools GmbH · DE

Inventors

Volker Drexel · Oberkochen, DE
Ulrich Mantz · Heroldstatt, DE
Bernd Irmer · Munich, DE
Christian Penzkofer · Munich, DE

Key dates

Filing date	Sep 30, 2009
Grant date	Apr 24, 2012
Priority date	—
Expiry date	Jul 28, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49888
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.