Inventor · Oberkochen, DE

Volker Drexel

14Patents
4h-index
15Co-inventors
53Inventor score

Filing activity: Jun 23, 1999 → May 10, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US6498345B1 Particle beam device Electricity 38 Expired
US7462839B2 Detector for variable pressure areas and an electron microscope comprising a corresponding detector Electricity 14 Expired
US7425701B2 Electron-beam device and detector system Electricity 14 Expired
US6872956B2 Particle beam device with a particle source to be operated in high vacuum and cascade-type pump arrangement for such a particle beam device Electricity 7 Expired
US7507962B2 Electron-beam device and detector system Electricity 3 Active
US7060978B2 Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system Electricity 2 Expired
US7910887B2 Electron-beam device and detector system Electricity 2 Active
US8431894B2 Electron beam device Electricity 2 Active
US8164071B2 Electron beam source and method of manufacturing the same Emerging Cross-Sectional Technologies 1 Active
US8178849B2 Objective lens Electricity 1 Active
US8362443B2 Objective lens Electricity 1 Active
US8723138B2 Electron beam source and method of manufacturing the same Emerging Cross-Sectional Technologies 0 Active
US10446360B2 Particle source for producing a particle beam and particle-optical apparatus Electricity 0 Active
US8536773B2 Electron beam source and method of manufacturing the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.