Patent · US Active

Balancing pressure to improve a fluid seal

US8168057B2 · kind B2 · utility

0Cited by
57References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 28, 2010
Grant dateMay 1, 2012
Priority date
Expiry dateMay 28, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/67023
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.