Balancing pressure to improve a fluid seal
US8168057B2 · kind B2 · utility
0Cited by
57References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 28, 2010 |
| Grant date | May 1, 2012 |
| Priority date | — |
| Expiry date | May 28, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67023
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.