Patent · US Active

Three-dimensional semiconductor template for making high efficiency thin-film solar cells

US8168465B2 · kind B2 · utility

13Cited by
65References
5Claims
0Family size

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Key dates

Filing dateNov 13, 2009
Grant dateMay 1, 2012
Priority date
Expiry dateJan 6, 2030

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T117/1092
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor template having a top surface aligned along a (100) crystallographic orientation plane and an inverted pyramidal cavity defined by a plurality of walls aligned along a (111) crystallographic orientation plane. A method for manufacturing a semiconductor template by selectively removing silicon material from a silicon template to form a top surface aligned along a (100) crystallographic plane of the silicon template and a plurality of walls defining an inverted pyramidal cavity each aligned along a (111) crystallographic plane of the silicon template.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.