Patent · US Active

Double gate depletion mode MOSFET

US8168500B2 · kind B2 · utility

8Cited by
9References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 25, 2011
Grant dateMay 1, 2012
Priority date
Expiry dateJan 25, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/125
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A metal-oxide-semiconductor field effect transistor (MOSFET) has a body layer that follows the contour of exposed surfaces of a semiconductor substrate and contains a bottom surface of a shallow trench and adjoined sidewalls. A bottom electrode layer vertically abuts the body layer and provides an electrical bias to the body layer. A top electrode and source and drain regions are formed on the body layer. The thickness of the body layer is selected to allow full depletion of the body layer by the top electrode and a bottom electrode layer. The portion of the body layer underneath the shallow trench extends the length of a channel to enable a high voltage operation. Further, the MOSFET provides a double gate configuration and a tight control of the channel to enable a complete pinch-off of the channel and a low off-current in a compact volume.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.