Patent · US Active

Integrated microphone

US8169042B2 · kind B2 · utility

5Cited by

6References

14Claims

0Family size

Assignee

Analog Devices, Inc. · US

Inventors

Jason W. Weigold · Somerville, US
John R. Martin · Foxborough, US
Timothy J. Brosnihan · Natick, US

Key dates

Filing date	Jul 28, 2010
Grant date	May 1, 2012
Priority date	—
Expiry date	Jul 28, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH04R19/04
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A method of forming a microphone having a variable capacitance first deposits high temperature deposition material on a die. The high temperature material ultimately forms structure that contributes to the variable capacitance. The method then forms circuitry on the die after depositing the deposition material. The circuitry is configured to detect the variable capacitance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.