Probing apparatus with multiaxial stages for testing semiconductor devices
US8169227B2 · kind B2 · utility
3Cited by
6References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 1, 2009 |
| Grant date | May 1, 2012 |
| Priority date | — |
| Expiry date | Nov 3, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probing apparatus for testing semiconductor devices comprises a housing configured to define a testing chamber, a device carrier positioned in the housing and configured to receive the semiconductor device, a platen positioned on the housing, an alignment module positioned on the platen, a planarity-adjusting module positioned on the alignment module, an angular adjusting module positioned on the planarity-adjusting module, and a card holder positioned on the angular adjusting module and configured to receive a probe card having a plurality of probes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.