Patent · US Active

Terahertz-infrared ellipsometer system, and method of use

US8169611B2 · kind B2 · utility

9Cited by

44References

23Claims

0Family size

Assignees

UNIVERSITY OF NEBRASKA BOARD OF REGENTS · US
J.A. WOOLLAM CO., INC. · US

Inventors

Craig M. Herzinger · Lincoln, US
Matias M. Schubert · Lincoln, US
Tino Hofmann · Harrisburg, US
Martin M. Liphardt · Lincoln, US
John A. Woollam · Lincoln, US

Key dates

Filing date	Jun 23, 2009
Grant date	May 1, 2012
Priority date	—
Expiry date	Aug 31, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/3595
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.