Micro-mirror actuator having encapsulation capability and method for the production thereof
US8169678B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 11, 2007 |
| Grant date | May 1, 2012 |
| Priority date | — |
| Expiry date | Feb 2, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention relates to a method for producing a micro-mirror actuator and the corresponding actuator. In the method, the actuator is generated from a layered construction made of at least three main layers (101, 103, 107), which are at least sectionally electrically insulated from one another via intermediate layers (102, 104, 106). The layers are structured to form the micro-mirror element and the electrodes, the structuring being performed in such a way that a closed frame (310) is formed from at least the uppermost layer (107) around the inner area of the actuator, which allows a hermetic encapsulation of the inner area by application of a cover plate onto the frame. Furthermore, a conductor level (105), which is electrically insulated from these layers via the intermediate layers, is generated between at least two of the layers and structured to form conductor paths, via which one or more electrodes may be electrically contacted from outside the frame (310) after the formation of contact openings in one or more of the intermediate layers (102, 104, 106).A hermetically sealed encapsulation of the inner area of actuator may already be achieved easily at the wafer level …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.