Marten Oldsen
19Patents
5h-index
29Co-inventors
62Inventor score
Filing activity: Nov 8, 2006 → Apr 21, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8546928B2 | Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof | Physics | 24 | Active |
| US8201452B2 | Housing for micro-mechanical and micro-optical components used in mobile applications | Emerging Cross-Sectional Technologies | 13 | Active |
| US9340412B2 | Suspended membrane for capacitive pressure sensor | Performing Operations; Transporting | 6 | Active |
| US9726561B2 | Differential pressure sensor with a capacitive read out system | Physics | 5 | Active |
| US9670057B1 | Sensor device and method for making thereof | Performing Operations; Transporting | 5 | Active |
| US8526098B2 | Microsystem and method for the production of a microsystem | Emerging Cross-Sectional Technologies | 4 | Active |
| US8169678B2 | Micro-mirror actuator having encapsulation capability and method for the production thereof | Performing Operations; Transporting | 3 | Active |
| US9557238B2 | Pressure sensor with geter embedded in membrane | Physics | 3 | Active |
| US8039950B2 | Solder material lining a cover wafer attached to wafer substrate | Emerging Cross-Sectional Technologies | 2 | Active |
| US10859457B2 | Sensor device including sensor unit for a gaseous medium | Physics | 2 | Active |
| US8517545B2 | Cover for microsystems and method for producing a cover | Emerging Cross-Sectional Technologies | 2 | Active |
| US9385099B2 | Die interconnect | Electricity | 1 | Active |
| US11428661B2 | Method for producing a moisture sensor at the wafer level and moisture sensor | Electricity | 1 | Active |
| US7410828B2 | Method of creating a predefined internal pressure within a cavity of a semiconductor device | Performing Operations; Transporting | 1 | Active |
| US12415719B2 | MEMS sensor with particle filter and method for producing it | Electricity | 0 | Active |
| US12188839B2 | Sensor device including sensor unit for a gaseous medium | Physics | 0 | Active |
| US8213066B2 | Electrostatic comb-drive micromechanical actuator | Physics | 0 | Active |
| US11703681B2 | MEMS devices comprising spring element and comb drive and associated production methods | Physics | 0 | Active |
| US11774308B2 | Sensor device including sensor unit for a gaseous medium | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.