Patent · US Active

Phase-shifting element and particle beam device having a phase-shifting element

US8173963B2 · kind B2 · utility

3Cited by

8References

25Claims

0Family size

Assignee

Carl Zeizz NTS GmbH · DE

Inventors

Rasmus Schröder · Heidelberg, DE
Bastian Barton · Frankfurt, DE
Gerd Benner · Aalen, DE
Harald Rose · Darmstadt, DE

Key dates

Filing date	Jan 20, 2011
Grant date	May 8, 2012
Priority date	—
Expiry date	Jan 20, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2809
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.