Infrared detecting device and manufacturing method thereof
US8178844B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 12, 2009 |
| Grant date | May 15, 2012 |
| Priority date | — |
| Expiry date | Sep 11, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/023
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An infrared detecting device is provided that is capable of improving device characteristics thereof by narrowing the width of each beam portion. The infrared detecting device has an infrared detection portion having a thermoelectric transducing part formed over a semiconductor substrate via an air gap interposed therebetween, and the beam portions which are formed over the semiconductor substrate via the air gap interposed therebetween, support the infrared detection portion and electrically connect between the infrared detection portion and the semiconductor substrate, wherein each of the beam portions has an insulating material film and a conductive material layer exposed from the insulating material film to a side surface of each beam portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.