Patent · US Active

Capacitive acceleration sensor having a movable mass and a spring element

US8181522B2 · kind B2 · utility

2Cited by

6References

12Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Roland Scheuerer · Reutlingen, DE
Heribert Weber · Leverkusen, DE

Key dates

Filing date	Oct 20, 2008
Grant date	May 22, 2012
Priority date	—
Expiry date	Sep 28, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01P15/125
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An acceleration sensor having a mass which is movably supported outside its center of gravity, first electrodes on the mass and second electrodes located at a distance therefrom forming a capacitive sensor in order to determine a change in position of the mass as a function of time. At least one spring element which generates a restoring force when the mass is deflected from its neutral position is provided on the side of the mass facing the capacitive sensor. The mass may be obtained by being exposed from a material layer, and the mass is surrounded, at least at its side faces, by this material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.