Inventor · Reutlingen, DE

Roland Scheuerer

7Patents
1h-index
7Co-inventors
36Inventor score

Filing activity: Apr 28, 2005 → Nov 8, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US8181522B2 Capacitive acceleration sensor having a movable mass and a spring element Physics 2 Active
US8174082B2 Micromechanical component having multiple caverns, and manufacturing method Performing Operations; Transporting 1 Active
US7834452B2 Device made of single-crystal silicon Electricity 0 Active
US8419957B2 Method for producing a micromechanical component having a filler layer and a masking layer Performing Operations; Transporting 0 Active
US8564078B2 Method for producing a micromechanical component having a trench structure for backside contact Electricity 0 Active
US8298962B2 Device made of single-crystal silicon Electricity 0 Active
US8138006B2 Method for producing a micromechanical component having a trench structure for backside contact Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.