Patent · US Active

Measuring arrangement, semiconductor arrangement and method for operating a semiconductor component as a reference source

US8183879B2 · kind B2 · utility

3Cited by

23References

19Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Ralf Brederlow · Poing, DE
Roland Thewes · Puchheim, DE

Key dates

Filing date	Mar 6, 2009
Grant date	May 22, 2012
Priority date	—
Expiry date	Nov 3, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01R35/007
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to a measuring arrangement, a semiconductor arrangement and a method for operating a reference source, wherein at least one semiconductor component and a voltage source are connected to a measuring unit and the measuring unit provides a measured value that is proportional to the number of defects.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.