Pulse to pulse energy equalization of light beam intensity
US8184262B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 14, 2008 |
| Grant date | May 22, 2012 |
| Priority date | — |
| Expiry date | Jan 12, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/354
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A system for equalizing pulse to pulse energy of a light beam includes a group of optical devices including an optical device configured to exhibit third order nonlinear properties. Transmission properties of an unequalized light beam passing through the group of optical devices change such that an output intensity of a resulting light beam output from the optical devices is equalized. One example configuration includes a beam splitter, a nonlinear interference filter, a mirror and a beam combiner. A first portion of the light beam that is reflected from the nonlinear interference filter is combined with the light beam such that a resulting combined light beam has equalized output intensity. Another example includes at least first and second prisms having third order nonlinear properties and configured as a beam steering system. A lithography system and a method of equalizing pulse to pulse energy in a light beam are also presented.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.