Patent · US Active

Method of producing substrate

US8186052B2 · kind B2 · utility

4Cited by
13References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 15, 2008
Grant dateMay 29, 2012
Priority date
Expiry dateOct 9, 2030

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49165
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

The method of producing a substrate comprises the steps of: forming a through-hole in a base member; filling the through-hole with an insulating material; performing electroless plating to coat the surface of the base member, in which the through-hole has been filled with the insulating material, with an electroless-plated layer; applying photo resist on the electroless-plated layer formed on the surface of the base member; optically exposing and developing the photo resist so as to form a resist pattern coating an end face of the through-hole filled with the insulating material; etching an electrically conductive layer formed on the surface of the base member with using the resist pattern as a mask; and removing the resist pattern coating the end face of the through-hole from the base member with using the electroless-plated layer as a release layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.