Large area roll-to-roll imprint lithography

US8187515B2 · kind B2 · utility

Assignees

• Molecular Imprints, Inc. · US
• The Board of Regents of the University of Texas · US

Inventors

• Sidlgata V. Sreenivasan · Austin, US
• Shrawan Singhal · Austin, US
• Byung-Jin Choi · Round Rock, US
• Ian McMackin · Austin, US

Key dates

• Filing date: Mar 31, 2009
• Grant date: May 29, 2012
• Expiry date: Oct 11, 2029

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B82Y40/00
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

Droplets of polymerizable material may be patterned on a film sheet. The droplets of polymerizable material may be dispensed on the film sheet. A pre-determined force may be applied to an imprint lithography template such that localized trapping of the droplets of the polymerizable material on the film sheet is minimized and the droplets coalesce to form a continuous layer. The polymerizable material may be solidified to form a patterned layer having a residual layer and at least one feature.