Lithographic apparatus provided with a swap bridge
US8189174B2 · kind B2 · utility
3Cited by
3References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 11, 2009 |
| Grant date | May 29, 2012 |
| Priority date | — |
| Expiry date | Jan 7, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70733
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lithographic apparatus includes two stages that are each configured to hold a substrate, wherein each stage is provided with a short stroke module to move a table with a substrate and a long stroke module to move the short stroke module of that stage. The lithographic apparatus includes a swap bridge to couple the stages, and wherein, in use, in a first configuration, the stages are moveable with respect to each other, and wherein, in use, in a second configuration, the stages are coupled via the swap bridge to make a joint movement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.