Thin film detector for presence detection
US8193685B2 · kind B2 · utility
Assignee
Inventors
- Mareike Klee
- Ronald Dekker
- Harry Van Esch
- Marco De Wild
- Ruediger Mauczok
- Chris Van Heesch
- Willem Franke Pasveer
- Engel Johannes Knibbe
- Remco Alphonsus Hendrikus Breen
- Klaus Reimann
- Biju Kumar Sreedharan Nair
- Roger Peter Anna Delnoij
- Henri Marie Joseph Boots
- Christina Adriana Renders
- Olaf Wunnicke
- Derk Reefman
- Peter Dirksen
Key dates
| Filing date | Jun 30, 2008 |
| Grant date | Jun 5, 2012 |
| Priority date | — |
| Expiry date | Jun 30, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent the active portion (821). A patterned conductive layer including first and second electrodes (840, 845) is formed over the piezoelectric layer (820). Further, a back substrate structure is provided having supports (822, 824) located at the peripheral portions adjacent the active portion (821). The height (826) of the supports (822, 824) is greater than a combined height (828) of the patterned piezoelectric layer and the patterned conductive layer. Many transducers may be connected to form an array, where a controller may be provided for controlling the array, such as steering a beam of the array, and processing signals received by the array, for presence or motion detection and/or imaging, for example.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.