Enhanced focusing capability on a sample using a spot matrix
US8194240B1 · kind B1 · utility
7Cited by
14References
8Claims
0Family size
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Key dates
| Filing date | Mar 4, 2008 |
| Grant date | Jun 5, 2012 |
| Priority date | — |
| Expiry date | Sep 2, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7026
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A plurality of spots forming an M×N matrix can be used in a focus system. Specifically, a plurality of identical spots can be simultaneously projected onto the sample. A V(z) curve can be generated for each spot. A robust focus can be determined based on the generated V(z) curves. Using the spot matrix significantly increases the probability that at least one of the plurality of spots in the matrix can provide an unambiguous V(z) curve. Thus, the spot matrix eliminates the need to search for an appropriate site because the spot matrix increases the probability of landing on a “good” location by a factor of M×N.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.