Integrated gas panel apparatus
US8196609B2 · kind B2 · utility
19Cited by
6References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2007 |
| Grant date | Jun 12, 2012 |
| Priority date | — |
| Expiry date | Jun 26, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Provided is an integrated gas panel apparatus which has excellent responsiveness, stabilizes gas concentration, and furthermore, can keep a conventional panel shape as it is. A panel body comprises at least a main flow channel block body for forming a main flow channel, and a branch flow channel block body for forming a branch flow channel. The branch flow channel block bodies are arranged on the both right and left sides to face each other by having the main flow channel block body at the center.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.