Ultrasonic transducer and manufacturing method thereof
US8198782B2 · kind B2 · utility
2Cited by
6References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2010 |
| Grant date | Jun 12, 2012 |
| Priority date | — |
| Expiry date | Apr 30, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B1/0292
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An ultrasonic transducer includes a first electrode, a second electrode, an insulating film disposed between the first and second electrodes, and a cavity disposed between the first and second electrodes. The insulating film includes a projection extending in the cavity, and a portion of the cavity is disposed between the projection and the first electrode. A portion of one of the first electrode and the second electrode has an opening corresponding to a position of the projection of the insulating film when viewed in plan view.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.