Apparatus and method for simultaneous treatment of multiple workpieces
US8207047B2 · kind B2 · utility
0Cited by
9References
21Claims
0Family size
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Key dates
| Filing date | Dec 11, 2009 |
| Grant date | Jun 26, 2012 |
| Priority date | — |
| Expiry date | Oct 7, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67781
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.