Derek Aqui
16Patents
6h-index
28Co-inventors
66Inventor score
Filing activity: Apr 1, 1993 → Jun 23, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5347138A | In situ real time particle monitor for a sputter coater chamber | Physics | 20 | Expired |
| US5637881A | Method to detect non-spherical particles using orthogonally polarized light | Physics | 19 | Expired |
| US5436465A | Modular particle monitor for vacuum process equipment | Physics | 18 | Expired |
| US8309374B2 | Advanced platform for processing crystalline silicon solar cells | Emerging Cross-Sectional Technologies | 10 | Active |
| US8173473B2 | Laser system for processing solar wafers in a carrier | Emerging Cross-Sectional Technologies | 7 | Active |
| US5606418A | Quasi bright field particle sensor | Physics | 6 | Expired |
| US5534706A | Particle monitor for throttled pumping systems | Physics | 6 | Expired |
| US8151852B2 | Bonding apparatus and method | Emerging Cross-Sectional Technologies | 3 | Active |
| US5773841A | Self aligning vacuum seal assembly | Chemistry; Metallurgy | 2 | Expired |
| US8360409B2 | Apparatus and method for simultaneous treatment of multiple workpieces | Electricity | 1 | Active |
| US8334191B2 | Two-chamber system and method for serial bonding and exfoliation of multiple workpieces | Electricity | 1 | Active |
| US8545660B1 | Bonding apparatus and method | Emerging Cross-Sectional Technologies | 0 | Active |
| US12146736B2 | Metrology system | Physics | 0 | Active |
| US8207047B2 | Apparatus and method for simultaneous treatment of multiple workpieces | Electricity | 0 | Active |
| US10598521B2 | Metrology system | Physics | 0 | Active |
| US11486689B2 | Metrology system | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.