Nano/microwire solar cell fabricated by nano/microsphere lithography

US8211735B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• William Graham · Dobbs Ferry, US
• Supratik Guha · Croton-on-Hudson, US
• Oki Gunawan · Westwood, US
• George S. Tulevski · White Plains, US
• Kejia Wang · Fishkill, US
• Ying Zhang · Santa Clara, US

Key dates

• Filing date: Jun 8, 2009
• Grant date: Jul 3, 2012
• Expiry date: Jul 30, 2029

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/827

Abstract

Techniques for fabricating nanowire/microwire-based solar cells are provided. In one, a method for fabricating a solar cell is provided. The method includes the following steps. A doped substrate is provided. A monolayer of spheres is deposited onto the substrate. The spheres include nanospheres, microspheres or a combination thereof The spheres are trimmed to introduce space between individual spheres in the monolayer. The trimmed spheres are used as a mask to pattern wires in the substrate. The wires include nanowires, microwires or a combination thereof A doped emitter layer is formed on the patterned wires. A top contact electrode is deposited over the emitter layer. A bottom contact electrode is deposited on a side of the substrate opposite the wires.