Patent · US Active

Fixing apparatus for a probe card

US8212579B2 · kind B2 · utility

2Cited by

3References

8Claims

0Family size

Assignee

ADVANTEST CORPORATION · JP

Inventors

Yoshihiro Abe · Ebeye, US
Shigeru Matsumura · Tokyo, JP

Key dates

Filing date	May 22, 2008
Grant date	Jul 3, 2012
Priority date	—
Expiry date	Sep 22, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/31905
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A fixing apparatus for fixing a probe card to a holder includes a screw fixed to the holder and binding the probe card onto the holder in a vertical direction, a first bearing member intervening between a head of the screw and the probe card and allowing expansion and contraction of the probe card with respect to the screw in a horizontal direction, and a second bearing member intervening between the probe card and the holder and allowing expansion and contraction of the probe card with respect to the holder in the horizontal direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.