Patent · US Active

Interferometric measurement of non-homogeneous multi-material surfaces

US8213021B2 · kind B2 · utility

2Cited by

0References

21Claims

0Family size

Assignee

Veeco Metrology, Inc. · US

Inventors

Dong Chen · Tucson, US
Florin Munteanu · Tucson, US
Erik Novak · Tucson, US
G. Lawrence Best · Tucson, US

Key dates

Filing date	Jun 29, 2007
Grant date	Jul 3, 2012
Priority date	—
Expiry date	May 3, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01B11/0608
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Correction factors for the ALR and PTR parameters of magnetic-head sliders are determined by calculating an effective reflectivity and a corresponding PCOR at each pixel of the air-bearing surface. The absolute value of reflectivity at each pixel of the AlTiC air-bearing surface is obtained from an empirical equation relating it to modulation. The ratio of Al2O3 and TiC in the AlTiC surface is then calculated at every pixel assuming a linear relationship between the absolute value of AlTiC reflectivity and the theoretical reflectivity of each constituent. The linear relationship is then also used to calculate the effective (complex) reflectivity for the AlTiC material from the relative concentrations of Al2O3 and TiC at each pixel.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.