Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever
US8214915B2 · kind B2 · utility
2Cited by
5References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2009 |
| Grant date | Jul 3, 2012 |
| Priority date | — |
| Expiry date | Feb 20, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/32
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.