Patent · US Active

Isolating a control signal source in a high frequency power supply

US8222885B2 · kind B2 · utility

9Cited by

52References

15Claims

0Family size

Assignee

HUETTINGER Elektronik GmbH + Co. KG · DE

Inventors

Thomas Kirchmeier · Teningen, DE
Hans-Juergen Windisch · Ehrenkirchen, DE
Michael Glueck · Schreiber, CA
Erich Pivit · Allmersbach im Tal, DE

Key dates

Filing date	Jul 22, 2008
Grant date	Jul 17, 2012
Priority date	—
Expiry date	Jan 10, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02B20/00
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A high frequency power supply, in particular a plasma supply device, for generating an output power greater than 1 kW at a basic frequency of at least 3 MHz with at least one switch bridge, which has two series connected switching elements, wherein one of the switching elements is connected to a reference potential varying in operation, and is activated by a driver, and wherein the driver has a differential input with two signal inputs and is connected to the reference potential varying in operation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.