Method and apparatus for robot calibrations with a calibrating device

US8224607B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Vijay K. Sakhare · Mason, US
• Sekar Krishnasamy · Kanchinakote, IN
• Mordechai Leska · Nesher, IL
• Donald Foldenauer · San Jose, US
• Rinat Shimshi · San Jose, US
• Marvin L. Freeman · Boynton, US
• Jeffery Hudgens · San Francisco, US
• Satish Sundar · San Jose, US

Key dates

• Filing date: Aug 25, 2008
• Grant date: Jul 17, 2012
• Expiry date: Nov 9, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B2219/39056
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.