Fast swap dual substrate transport for load lock
US8231322B2 · kind B2 · utility
6Cited by
23References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 18, 2008 |
| Grant date | Jul 31, 2012 |
| Priority date | — |
| Expiry date | Apr 18, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber without the need for a central transport robot. The load lock transport is a dual element robot designed for minimum clearance and space and operates within a matching load lock chamber of minimum volume.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.