Magnetic field generating apparatus and plasma processing apparatus
US8231767B2 · kind B2 · utility
7Cited by
1References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2010 |
| Grant date | Jul 31, 2012 |
| Priority date | — |
| Expiry date | Dec 21, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/76877
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A magnetic field generating apparatus which generates a cusped magnetic field on an electrode includes a magnet mechanism which is attached to the electrode and includes a plurality of magnets held on a holding plate, and a rotation mechanism which rotates the holding plate. The plurality of magnets (61) are regularly arrayed to be point-symmetrical about a specific point. The specific point is at a position shifted from the center of rotation of the holding plate by the rotation mechanism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.