Inventor · Hachioji, JP

Masayoshi Ikeda

28Patents
7h-index
40Co-inventors
69Inventor score

Filing activity: Mar 31, 1987 → May 15, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US7615133B2 Electrostatic chuck module and cooling system Emerging Cross-Sectional Technologies 33 Expired
US7175737B2 Electrostatic chucking stage and substrate processing apparatus Emerging Cross-Sectional Technologies 17 Expired
US7220319B2 Electrostatic chucking stage and substrate processing apparatus Emerging Cross-Sectional Technologies 16 Expired
US9564360B2 Substrate processing method and method of manufacturing semiconductor device Chemistry; Metallurgy 11 Active
US6078671A Silencer for attenuating a sound or noise transmitted through an air passage of a duct Mechanical Engineering; Lighting; Heating 11 Expired
US6532796B1 Method of substrate temperature control and method of assessing substrate temperature controllability Emerging Cross-Sectional Technologies 9 Expired
US6774570B2 RF plasma processing method and RF plasma processing system Electricity 7 Expired
US8231767B2 Magnetic field generating apparatus and plasma processing apparatus Electricity 7 Active
US8778151B2 Plasma processing apparatus Electricity 3 Active
US9601688B2 Method of manufacturing magnetoresistive element and method of processing magnetoresistive film Electricity 3 Active
US9190287B2 Method of fabricating fin FET and method of fabricating device Electricity 3 Active
US9844126B2 Plasma treatment apparatus Electricity 2 Active
US6426299B1 Method and apparatus for manufacturing semiconductor device Electricity 2 Expired
US7513063B2 Substrate processing apparatus Electricity 2 Expired
US4867843A Surface roughening of ceramics and application to production of ceramic wiring board Emerging Cross-Sectional Technologies 2 Expired
US8970213B2 Method for manufacturing magnetoresistance effect element Physics 2 Active
US4842899A Process for forming metallic film on inorganic material Electricity 1 Expired
USRE42175E1 Electrostatic chucking stage and substrate processing apparatus General 1 Active
US10226978B2 Vehicle height adjustment device Performing Operations; Transporting 0 Active
US10046615B2 Vehicle height adjustment device Performing Operations; Transporting 0 Active
US10214070B2 Vehicle height adjustment device Performing Operations; Transporting 0 Active
US10214069B2 Vehicle height adjustment device Performing Operations; Transporting 0 Active
US10157961B2 Method of manufacturing magnetoresistive element Electricity 0 Active
US7976716B2 Semiconductor device manufacturing method Electricity 0 Active
US8007633B2 Surface processing apparatus Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.