Masayoshi Ikeda
28Patents
7h-index
40Co-inventors
69Inventor score
Filing activity: Mar 31, 1987 → May 15, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7615133B2 | Electrostatic chuck module and cooling system | Emerging Cross-Sectional Technologies | 33 | Expired |
| US7175737B2 | Electrostatic chucking stage and substrate processing apparatus | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7220319B2 | Electrostatic chucking stage and substrate processing apparatus | Emerging Cross-Sectional Technologies | 16 | Expired |
| US9564360B2 | Substrate processing method and method of manufacturing semiconductor device | Chemistry; Metallurgy | 11 | Active |
| US6078671A | Silencer for attenuating a sound or noise transmitted through an air passage of a duct | Mechanical Engineering; Lighting; Heating | 11 | Expired |
| US6532796B1 | Method of substrate temperature control and method of assessing substrate temperature controllability | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6774570B2 | RF plasma processing method and RF plasma processing system | Electricity | 7 | Expired |
| US8231767B2 | Magnetic field generating apparatus and plasma processing apparatus | Electricity | 7 | Active |
| US8778151B2 | Plasma processing apparatus | Electricity | 3 | Active |
| US9601688B2 | Method of manufacturing magnetoresistive element and method of processing magnetoresistive film | Electricity | 3 | Active |
| US9190287B2 | Method of fabricating fin FET and method of fabricating device | Electricity | 3 | Active |
| US9844126B2 | Plasma treatment apparatus | Electricity | 2 | Active |
| US6426299B1 | Method and apparatus for manufacturing semiconductor device | Electricity | 2 | Expired |
| US7513063B2 | Substrate processing apparatus | Electricity | 2 | Expired |
| US4867843A | Surface roughening of ceramics and application to production of ceramic wiring board | Emerging Cross-Sectional Technologies | 2 | Expired |
| US8970213B2 | Method for manufacturing magnetoresistance effect element | Physics | 2 | Active |
| US4842899A | Process for forming metallic film on inorganic material | Electricity | 1 | Expired |
| USRE42175E1 | Electrostatic chucking stage and substrate processing apparatus | General | 1 | Active |
| US10226978B2 | Vehicle height adjustment device | Performing Operations; Transporting | 0 | Active |
| US10046615B2 | Vehicle height adjustment device | Performing Operations; Transporting | 0 | Active |
| US10214070B2 | Vehicle height adjustment device | Performing Operations; Transporting | 0 | Active |
| US10214069B2 | Vehicle height adjustment device | Performing Operations; Transporting | 0 | Active |
| US10157961B2 | Method of manufacturing magnetoresistive element | Electricity | 0 | Active |
| US7976716B2 | Semiconductor device manufacturing method | Electricity | 0 | Active |
| US8007633B2 | Surface processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.