Method for forming non-aligned microcavities of different depths
US8236698B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2007 |
| Grant date | Aug 7, 2012 |
| Priority date | — |
| Expiry date | Feb 13, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0384
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The invention relates to a method for forming microcavities (118) of different depths in a layer (102) based on at least an amorphous or monocrystalline material, comprising at least the following steps in which: at least one shaft and/or trench is formed in the layer (102) so as to extend through one face (101) thereof, such that two sections of the shaft and/or the trench, in two different planes parallel to the face (101), are aligned in relation to one another along an alignment axis forming a non-zero angle with a normal to the plane of said face (101); and the layer (102) is annealed in a hydrogenated atmosphere so as to transform the shaft and/or trench into at least two microcavities (118).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.