Contactor, probe card, and method of mounting contactor
US8237461B2 · kind B2 · utility
11Cited by
8References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 24, 2007 |
| Grant date | Aug 7, 2012 |
| Priority date | — |
| Expiry date | Apr 13, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49222
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A contactor includes conductive parts for electrical connection with input/output terminals of an IC device; beam parts with the conductive part provided on their main surfaces; and a base part supporting the beam parts in a cantilever manner, the base part has a support region supporting the beam parts and mark formation regions at which first positioning marks are provided, and weakened parts relatively weaker in strength than other parts of the base part are provided between the support region and mark formation regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.