On-the-fly laser beam path error correction for specimen target location processing
US8238007B2 · kind B2 · utility
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25Claims
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Key dates
| Filing date | Dec 26, 2006 |
| Grant date | Aug 7, 2012 |
| Priority date | — |
| Expiry date | Feb 17, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.