Contactor, contact structure, probe card, and test apparatus
US8241929B2 · kind B2 · utility
2Cited by
8References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2011 |
| Grant date | Aug 14, 2012 |
| Priority date | — |
| Expiry date | Dec 14, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A contactor and an associated contact structure, probe card and test apparatus are provided. The contact may include a base part having three or more steps in a stairway state, a support part with a rear end side provided at the base part and a front end side sticking out from the base part, and a conductive part formed on a surface of the support part and electrically contacting a contact of a device under test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.