Dynamic power control, beam alignment and focus for nanoscale spectroscopy

US8242448B2 · kind B2 · utility

Assignee

• Anasys Instruments · US

Inventors

• Craig Prater · Lompoc, US
• Michael Hawjing Lo · San Francisco, US
• Doug Gotthard · Carpinteria, US
• Anthony D. Kurtz · Englewood, US
• Kevin Kjoller · Lompoc, US

Key dates

• Filing date: Nov 9, 2010
• Grant date: Aug 14, 2012
• Expiry date: Feb 10, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q30/02
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Dynamic IR radiation power control, beam steering and focus adjustment for use in a nanoscale IR spectroscopy system based on an Atomic Force Microscope. During illumination with a beam from an IR source, an AFM probe tip interaction with a sample due to local IR sample absorption is monitored. The power of the illumination at the sample is dynamically decreased to minimize sample overheating in locations/wavelengths where absorption is high and increased in locations/wavelengths where absorption is low to maintain signal to noise. Beam alignment and focus optimization as a function of wavelength are automatically performed.